➀ Si-MRM is an ideal device for optical communication, interconnect, computing, and microwave photonics due to its compact size, low drive voltage, and high bandwidth.
➁ High linearity is crucial for special applications like analog optical links and high-precision optical computing.
➂ MOSCAP structure improves Si MRM linearity by enhancing the capacitance density and linearly accumulating charge with gate voltage, which compensates for the nonlinear Lorentz transmission curve of the MRM.
➃ MOSCAP Si MRM demonstrates excellent linearity and a high SFDR of 106 dB·Hz²/³.
➄ University of Southampton and HPE have also developed MOSCAP MRM structures with notable performance improvements.