<p>➀ Si-MRM is an ideal device for optical communication, interconnect, computing, and microwave photonics due to its compact size, low drive voltage, and high bandwidth.</p><p>➁ High linearity is crucial for special applications like analog optical links and high-precision optical computing.</p><p>➂ MOSCAP structure improves Si MRM linearity by enhancing the capacitance density and linearly accumulating charge with gate voltage, which compensates for the nonlinear Lorentz transmission curve of the MRM.</p><p>➃ MOSCAP Si MRM demonstrates excellent linearity and a high SFDR of 106 dB·Hz²/³.</p><p>➄ University of Southampton and HPE have also developed MOSCAP MRM structures with notable performance improvements.</p>