➀ South Korean semiconductor equipment maker PSK secured a partial invalidation of Lam Research's patent for a gap controllable bevel etcher (Patent No. 1433411);

➁ The Intellectual Property Trial and Appeal Board of Korea ruled specific claims (Articles 1, 2, 5, 13, 19, 20) of Lam's patent invalid;

➂ The decision marks a significant development in intellectual property disputes within the semiconductor manufacturing equipment sector.