➀ The Vista 300 from Molecular Vista combines AFM and infrared spectroscopy to offer Photo-induced Force Microscopy (PiFM) with a spatial resolution of <5 nm, superior to methods like TOF-SIMS or XPS. ➁ PiFM can map and identify molecules, including organic or polymeric contaminants, inorganic particles, or EUV resist films. ➂ The instrument is designed for full 300 mm wafer analysis with a compact footprint and includes new automation features like AutoPiFM and AutoAlign for ease of use.