<p>➀ The evolution of EUV photolithography gel from the 1970s to the present day, including various materials research.</p><p>➁ The unique aspects of EUV photolithography, such as short-wavelength manufacturing, special reflective optical systems, and special material systems.</p><p>➂ Common types of EUV photolithography gel, including chemical amplification, inorganic, non-chemical amplification, and hybrid gel.</p><p>➃ The main challenges in the development of EUV photolithography gel, such as sensitivity, resolution and LER, outgassing, and thermal stability.</p>