<p>➀ Chinese researchers have developed an EUV light source platform that operates at internationally competitive parameters, a breakthrough for the domestic production of advanced chips;</p><p>➁ The team, led by Lin Nan, has achieved world-class results in photolithography research using a solid-state laser-driven approach;</p><p>➂ The platform, based on a solid-state laser, has reached more than half of the conversion efficiency rate of commercially available CO2 laser-driven light sources, surpassing previous international benchmarks.</p>